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SNEN 62047-12:2011(D)

Normnumber
DV-22838/4
Publisher
CLC
Technical commitee
TK 47
Page count
29
Price
87.10 CHF
IEC reference
IEC 62047-12:2011
Publication year
2011
Date of ratification (DOR)
18.10.2011
Date of withdrawal (DOW)
18.10.2014
Norm title german
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 12: Verfahren zur Prüfung der Biege-Ermüdungsfestigkeit von Dünnschichtwerkstoffen unter Verwendung der Resonanzschwingungen bei MEMS-
Norm title english
Semiconductor devices - Microelectromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Norm title french
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 12: Méthode d'essai de fatigue en flexion des matériaux en couche mince utilisant les vibrations à la résonance des structur

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